A na-ejikarị WF6 eme ihe dị ka akụrụngwa maka ntinye mmiri mmiri kemịkalụ (CVD) nke tungsten ọla na ụlọ ọrụ eletrọnịkị. Enwere ike iji WSi2 mere site na WF6 dị ka ihe eji eme wiring na nnukwu sekit agbakwunyere (LSI), a pụkwara iji ya mee ihe dị ka akụrụngwa maka electrodes semiconductor, fluorine Raw material for chemical agents, polymerization catalysts, optical material, etc.